Handles five different wafer sizes with minimal hardware change-over
SAN FRANCISCO — (BUSINESS WIRE) — July 7, 2011 — Nordson MARCH, a global leader in plasma processing technology, introduces the new FlexTRAK™-WF plasma treatment system, a low-cost, cassette-based automated plasma treatment system that handles five wafer sizes with minimal hardware change-over. An integrated robot and aligner automate the processing of a wide variety of wafers and other flat substrates. The system offers high throughput, ranging up to 50 wafers per hour, while maintaining superior plasma uniformity for ashing, etching, and descum for wafer level packaging and general wafer-based processing applications.
The FlexTRAK-WF treatment system provides two separate wafer load stations for production continuity and minimal idle time. Technologies such as a universal cassette stage and multi-size aligner allow for processing of wafer sizes ranging from 3 inches to 200 mm with minimal hardware change-over, reducing user intervention and maximizing system utility. The system also utilizes integrated wafer recognition technology to detect and adjust for potential issues such as wafer protrusion, double-stacking, and cross-slotting, thereby achieving high equipment reliability.
"Plasma treatment is an enabling technology that significantly improves quality in many areas of wafer level packaging and the applications are growing steadily," explained James Getty, vice president Business Development and Applications, Nordson MARCH. “Nordson MARCH's new FlexTRAK-WF system automates the plasma treatment process by expanding the number and size of wafers that can be processed during one run, speeding throughput and reducing costs.”
Nordson MARCH will be demonstrating the advanced capabilities of the FlexTRAK-WF in booth #6071 at SEMICON West, Moscone Center, San Francisco, CA from July 12 – July 14, 2011.
Photo available at: http://www.nordson.com/en-us/divisions/march/PublishingImages/High-Res/FlexTRAK-WF-NordsonMarch-hires.jpg
About Nordson MARCH
Nordson MARCH is the global leader in plasma processing technology for the semiconductor, printed circuit board (PCB), microelectronics, and medical & life science device manufacturing industries. Nordson MARCH has offices and applications laboratories worldwide, including California, Florida, Europe, Singapore, China, Japan, Korea and Taiwan. With over 20 years of continuous innovation, Nordson MARCH designs and manufactures a complete line of award-winning and patented plasma processing systems. An expert staff of scientists and engineers is available to assist in the development of plasma processes that improve product reliability and increase production yields. Visit the Nordson MARCH website for more details: http://www.nordsonmarch.com.
About Nordson Corporation
Nordson Corporation (Nasdaq: NDSN) is one of the world’s leading producers of precision dispensing equipment that applies adhesives, sealants, liquid and powder coatings and other materials to a broad range of consumer and industrial products during manufacturing operations. The company also manufactures equipment used in the testing and inspection of electronic components as well as technology-based systems for UV curing and surface treatment processes. Headquartered in Westlake, Ohio, Nordson has direct operations and sales support offices in more than 30 countries. Visit Nordson on the web at www.nordson.com, www.twitter.com/Nordson_Corp or Facebook.
Summary
Nordson MARCH's FlexTRAK™-WF low-cost, cassette-based automated plasma treatment system handles 5 wafer sizes with minimal hardware change-over for a wide variety of wafers and other flat substrates.
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