GRENOBLE, France – April 23, 2024 – CEA-Leti will present seven papers and one poster on its latest developments in microelectronics packaging, including three covering 3-layer integration, at the Electronic Components and Technology Conference (ECTC), May 28-31, in Denver.

A pioneer in heterogeneous 3D integration, the institute enables the combination of More Moore and More than Moore technologies. 3D integration and advanced packaging technologies are becoming mainstream for modular, high-bandwidth, low power consumption and efficient system architectures from consumer and automotive applications to high performance computing (HPC) and edge AI multi-layer smart imagers developed in the frame of IRT Nanoelec.

From high-density interconnection (fine pitch hybrid bonding DtoW and WtoW) to ultra-thin stacking layer interconnection with high density TSV and low temperature process, CEA-Leti is pushing the limits of 3D integration. It also is preparing the next generation of quantum computing with a complete set of packaging technologies.    

ECTC Papers / Poster

• “Aging Behaviour and Environmental Impact of Under Bump Metallurgies for Wafer Level Balling”
• Session 37, poster #33
• Wednesday, May 29 from 10:00 AM - 12:00 PM

• “3-Layer Fine Pitch Cu-Cu Hybrid Bonding Demonstrator With High Density TSV for Advanced CMOS Image Sensor Applications”
• Session 8, paper #2
• Wednesday, May 29 from 2:00 PM – 5:05 PM

• “Fine Pitch Nb-Nb Direct Bonding for Quantum Applications”
• Session 11, paper #3
• Wednesday, May 29 from 2:00 PM – 5:05 PM

• “Backside Thinning Process Development for High-Density TSV in a 3-Layers Integration”
• Session 9, paper #6
• Wednesday, May 29 from 2:00 PM – 5:05 PM

• “Process Development and Characterization of Ru-Based UBM for In Bumps Interconnects Integration for Quantum Assemblies”
• Session 9, paper #7
• Wednesday, May 29 from 2:00 PM – 5:05 PM

• “Copper Microstructure Optimization for Fine Pitch Low Temperature Cu/SiO2 Hybrid Bonding”
• Session 15, paper #6:
• Thursday, May 30 from 9:30 AM – 12:35 PM

• “Low Resistance and High Isolation HD TSV for 3-Layers CMOS Image Sensors”
• Session 19, paper #2
• Thursday, May 30 from 2:00 PM – 5:05 PM

• “Integration of Planarized Nb-Based Vias to Form a Multi-Level Superconducting Back-End-of-Line”
• Session 20, paper #1
• Thursday, May 30 from 2:00 PM – 5:05 PM

Jean-Charles Souriau, a CEA project leader in the field of micro-interconnection and packaging, will co-chair a May 29 technical program, Sub-Micron Scaling in Wafer-to-Wafer Hybrid Bonding. The Session 8 program will run from 2:00 PM – 5:05 PM.

CEA-Leti experts will be onsite at booth 511 and available to discuss the findings in the presentations.

About CEA-Leti

Leti, a technology research institute at CEA, is a global leader in miniaturization technologies enabling smart, energy-efficient and secure solutions for industry. Founded in 1967, CEA-Leti pioneers micro-& nanotechnologies, tailoring differentiating applicative solutions for global companies, SMEs and startups. CEA-Leti tackles critical challenges in healthcare, energy and digital migration. From sensors to data processing and computing solutions, CEA-Leti’s multidisciplinary teams deliver solid expertise, leveraging world-class pre-industrialization facilities. With a staff of more than 2,000, a portfolio of 3,200 patents, 11,000 sq. meters of cleanroom space and a clear IP policy, the institute is based in Grenoble, France, and has offices in Silicon Valley and Tokyo. CEA-Leti has launched 76 startups and is a member of the Carnot Institutes network. Follow us on www.leti-cea.com and @CEA_Leti.

Technological expertise

CEA has a key role in transferring scientific knowledge and innovation from research to industry. This high-level technological research is carried out in particular in electronic and integrated systems, from microscale to nanoscale. It has a wide range of industrial applications in the fields of transport, health, safety and telecommunications, contributing to the creation of high-quality and competitive products.

For more information: www.cea.fr/english 

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