Systems Will Support Volume 20nm DRAM Device Production Ramp

BEVERLY, Mass., Feb. 23, 2016 — (PRNewswire) —  Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has shipped a follow-on, multi system Purion H™ order to an existing volume production customer, one of the world's leading manufacturers of DRAM devices in the Asia Pacific region. The systems will be used to support the customer's ongoing multi-fab, volume production ramp of its advanced 20nm DRAM devices.

"We're excited to be a part of this capacity expansion at one of the world's largest chip manufacturers, and look forward to continuing to expand our market share," said John Aldeborgh, executive vice president, customer operations. "As our customers move towards advanced planar and 3D device manufacturing, they need unprecedented dopant precision to ensure the highest yields possible. With the Purion H, our team has incorporated advanced beamline technology and an innovative spot beam for precise dopant placement, coupled with the highest beam currents for optimized system performance."

The Power of Purion

The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers' device performance and yield. On this platform, Axcelis has built the industry's first complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability for our customers. The systems' common cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis' industry leading Purion Contamination Shield™ Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance. The platform's proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today. The platform's superior beam current performance combined with the Purion™ 500wph end station provides the industry's highest productivity. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE™ high energy implanter.

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.

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Axcelis Technologies, Inc. Web: http://www.axcelis.com