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Title : Model-based methodology MEMS Sizing and performance optimization
Company : InfiniScale®
Date : 03-Mar-2010
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This test case based upon a case-study MEMS accelerometer demonstrates the power of Modelbased methodology for MEMS sizing and performance optimization. Use of InfiniScale LYSIS tool set alongside with customer reference tools (3D EM simulation) is the only way to create an accurate enough, multi-dimensional behavioral model of the accelerometer.
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